Photochemical hydrogen desorption from H-terminated silicon(111) by VUV photons

被引:86
作者
Pusel, A [1 ]
Wetterauer, U [1 ]
Hess, P [1 ]
机构
[1] Univ Heidelberg, Inst Phys Chem, D-69120 Heidelberg, Germany
关键词
D O I
10.1103/PhysRevLett.81.645
中图分类号
O4 [物理学];
学科分类号
0702 ;
摘要
The 7.9 eV photons of a F-2 laser induced photochemical desorption of molecular hydrogen from Si(111)-(1 x 1):H surfaces with a cross section of (1.2 +/- 0.8) x 10(-20) cm(2). The time-of-flight detection of desorbing species and numerical calculations of surface heating clearly allowed photochemical Fz-laser (7.9 eV) desorption and photothermal XeCl-laser (4.0 eV) desorption to be distinguished. Molecular dynamics simulations indicate the appearance of atomic and molecular hydrogen. The efficiency of photodissociation and desorption is higher than for the electron-stimulated process.
引用
收藏
页码:645 / 648
页数:4
相关论文
共 19 条
[1]   REACTION-KINETICS IN SYNCHROTRON-RADIATION-EXCITED SI EPITAXY WITH DISILANE .1. ATOMIC LAYER EPITAXY [J].
AKAZAWA, H ;
UTSUMI, Y .
JOURNAL OF APPLIED PHYSICS, 1995, 78 (04) :2725-2739
[2]   STM-induced H atom desorption from Si(100): Isotope effects and site selectivity [J].
Avouris, P ;
Walkup, RE ;
Rossi, AR ;
Shen, TC ;
Abeln, GC ;
Tucker, JR ;
Lyding, JW .
CHEMICAL PHYSICS LETTERS, 1996, 257 (1-2) :148-154
[3]   Spectroscopic ellipsometry of germanium growth on hydrogen-terminated silicon (111) [J].
Barth, M ;
Hess, P .
APPLIED PHYSICS LETTERS, 1996, 69 (12) :1740-1742
[4]   ATOMIC SCALE CONVERSION OF CLEAN SI(111)-H-1X1 TO SI(111)-2X1 BY ELECTRON-STIMULATED DESORPTION [J].
BECKER, RS ;
HIGASHI, GS ;
CHABAL, YJ ;
BECKER, AJ .
PHYSICAL REVIEW LETTERS, 1990, 65 (15) :1917-1920
[5]   SURFACE DOPING OF SEMICONDUCTORS BY PULSED-LASER IRRADIATION IN REACTIVE ATMOSPHERE [J].
BENTINI, GG ;
BIANCONI, M ;
SUMMONTE, C .
APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING, 1988, 45 (04) :317-324
[6]   OPTIMIZATION OF A COMMERCIAL QUADRUPOLE MASS-SPECTROMETER FOR TIME-OF-FLIGHT MEASUREMENTS OF LASER-DESORPTION [J].
BRAUN, R ;
HESS, P .
INTERNATIONAL JOURNAL OF MASS SPECTROMETRY AND ION PROCESSES, 1993, 125 (2-3) :229-239
[7]   TIME-OF-FLIGHT INVESTIGATION OF INFRARED LASER-INDUCED MULTILAYER DESORPTION OF BENZENE [J].
BRAUN, R ;
HESS, P .
JOURNAL OF CHEMICAL PHYSICS, 1993, 99 (10) :8330-8340
[8]   Dynamics of the H atom abstraction of D adsorbed on Si(100) [J].
Buntin, SA .
JOURNAL OF CHEMICAL PHYSICS, 1998, 108 (04) :1601-1609
[9]   MORPHOLOGY OF HYDROGEN-TERMINATED SI(111) AND SI(100) SURFACES UPON ETCHING IN HF AND BUFFERED-HF SOLUTIONS [J].
DUMAS, P ;
CHABAL, YJ ;
JAKOB, P .
SURFACE SCIENCE, 1992, 269 :867-878
[10]   ON THE DUAL ROLE OF THE KNUDSEN LAYER AND UNSTEADY, ADIABATIC EXPANSION IN PULSE SPUTTERING PHENOMENA [J].
KELLY, R .
JOURNAL OF CHEMICAL PHYSICS, 1990, 92 (08) :5047-5056