Forty-channel phased array ultrasonic probe using 0.91Pb(Zn1/3Nb2/3)O3-0.09PbTiO3 single crystal

被引:25
作者
Saitoh, S [1 ]
Kobayashi, T [1 ]
Harada, K [1 ]
Shimanuki, S [1 ]
Yamashita, Y [1 ]
机构
[1] Toshiba Corp, Res & Dev Ctr, Mat & Devices Res Labs, Kawasaki, Kanagawa 2108582, Japan
关键词
D O I
10.1109/58.741526
中图分类号
O42 [声学];
学科分类号
070206 ; 082403 ;
摘要
A 0.91Pb(Zn1/3Nb2/3)O-3-0.09PbTiO(3) (PZN-PT) single crystal with high electromechanical coupling factor (k(33)) > 90% has been used to fabricate a 40-channel phased array ultrasonic probe with greater sensitivity and broader bandwidth than conventional probes. This probe has a center frequency of 3.5 MHz and an aperture of about 6.0 x 7.5 mm. The standard probe fabrication process was modified for PZN-PT. The dispersion of echo signals was within +/- 20% of the mean value. After recovery poling, the echo amplitude of the PZN-PT single-crystal probe is 8 and 5 dB higher than that of one- and two-matching-layer PZT probes, respectively. Moreover, the fractional bandwidth of the single-matching-layer PZN-PT probe is broader than that of the two-matching-layer PZT probes. The PZN-PT single crystals provide great improvements in the sensitivity and bandwidth of phased array probes.
引用
收藏
页码:152 / 157
页数:6
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