Humidity-dependent mechanical properties of polyimide films and their use for IC-compatible humidity sensors

Thin polyimide layers have been investigated to determine their volume expansion as a result of humidity absorption and desorption, respectively. Furthermore, we have used the experiments in order to clarify the physical and chemical processes of polyimide films in a wet environment as well as their humido-mechanical properties. It can be shown that the humidity-induced material extension is fairly linear in a wide range of humidity. The observed material behaviour strongly depends on the conditions of the polyimide fabrication process. Analogous to the well-known temperature extension coefficient, a humidity extension value of about 60 to 80 ppm/%RH is observed. This physical effect can be used to create piezoresistive humidity sensors working similarly to bimetal elements influenced by temperature.