A new multiprobe method of roundness measurements

被引:98
作者
Gao, W [1 ]
Kiyono, S [1 ]
Nomura, T [1 ]
机构
[1] TOHOKU UNIV,FAC ENGN,DEPT MECHATRON,AOBA KU,SENDAI,MIYAGI 980,JAPAN
来源
PRECISION ENGINEERING-JOURNAL OF THE AMERICAN SOCIETY FOR PRECISION ENGINEERING | 1996年 / 19卷 / 01期
关键词
metrology; on-machine measurement; roundness; spindle error; multiprobe method; mixed method; 3-point method; resolution; optical sensor;
D O I
10.1016/0141-6359(96)00006-2
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
This paper presents a new multiprobe method for roundness measurements called the mixed method. In this method, displacements at two points on a cylindrical workpiece and an angle at one of the two points are simultaneously monitored by two probes. The differential output of the probes cancels the effect of the spindle error, and deconvolving the differential data yields the correct roundness error. The mixed method is compared to the traditional 3-point method with respect to the transfer function and resolution. Unlike the 3-point method, the mixed method can completely separate the roundness error and the spindle error, and can measure high-frequency components regardless of the probe distance. Resolution can also be im proved throughout the entire frequency domain by increasing angular separation of the probes. An optical sensor specifically suited to the mixed method is designed and used to make roundness measurements. A fiber coupler and single-mode fibers are used in the sensor to divide a light beam from a laser diode into two beams, resulting in a compact sensor with good thermal drift characteristics. The displacement meter of the sensor is based on the imaging system principle and has a resolution of 0.1 mu m. The angle meter is based on the principle of autocollimation and has a resolution of 0.5 in. A measurement system is constructed to realize measurements of roundness by using the optical sensor. Experimental results confirming the effectiveness of the mixed method for roundness measurements are also presented in this paper.
引用
收藏
页码:37 / 45
页数:9
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