Magnetic micro-actuators and systems (MAGMAS)

被引:278
作者
Cugat, O [1 ]
Delamare, J
Reyne, G
机构
[1] CNRS, French Ctr Natl Rech Sci, Grenoble, France
[2] Inst Natl Polytech Grenoble, ENSIEG, LEG, Lab Electrotech Grenoble, F-38402 St Martin Dheres, France
[3] Univ Grenoble 1, F-38041 Grenoble, France
关键词
electromagnetic forces; MAGMAS; MEMS; micro-actuators; microgenerators; scale reduction laws;
D O I
10.1109/TMAG.2003.816763
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
Magnetic interactions provide outstanding performances for powerful integrated micro-actuators. This paper explains how magnetic interactions involving permanent magnets, currents, and various magnetic materials remain very effective and even improve as dimensions are reduced. The technological problems that have slowed the development of, magnetic micro-actuators and systems (MAGMAS) are progressively being solved. As long as materials scientists continue to develop better thick-film patterned permanent magnets compatible with microsystem technologies, MAGMAS will have a promising future.
引用
收藏
页码:3607 / 3612
页数:6
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