Detection mechanism of spontaneous polarization in ferroelectric thin films using electrostatic force microscopy

被引：17

作者：

Lee, K

Shin, H

Moon, WK

Jeon, JU

Pak, YE

机构：

[1] Samsung Adv Inst Technol, Microsyst Lab, Suwon 440600, South Korea

[2] Pohang Univ Sci & Technol, Dept Mech Engn, Pohang 790784, South Korea

来源：

JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS | 1999年 / 38卷 / 3A期

关键词：

electrostatic force microscopy; ferroelectrics; spontaneous polarization; detection mechanism; theoretical calculation;

D O I：

10.1143/JJAP.38.L264

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

Mechanism on the detection of spontaneous polarization in a Pb(Zr0.5Ti0.5)O-3 (PZT) film using contact mode of electrostatic force microscopy (EFM) is investigated. Theoretical calculations are performed on deflections induced by electrostatic force (u(omega)(e)) between the tip and the sample and electromechanical vibrations (u(omega)(p)) of the ferroelectric materials, respectively. From the calculation, u(omega)(e) and u(omega)(p) are 3.73 x 10(-9) and 1.77 x 10(-13) m; Enhanced mode of EFM shows the complete cancellation of the EFM image induced by the electrostatic force between the tip and the film through controlling de voltage. Hence, electrostatic force effect is a main contributor on the detection mechanism of spontaneous polarization using EFM in contact mode.

引用

收藏

页码：L264 / L266

页数：3

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