Recent developments and applications in electronic speckle pattern interferometry

被引:52
作者
Petzing, JN [1 ]
Tyrer, JR [1 ]
机构
[1] Univ Loughborough, Dept Mech Engn, Loughborough, Leics, England
关键词
speckle; interferometry; ESPI; static; dynamic; transient; wholefield;
D O I
10.1243/0309324981512887
中图分类号
TH [机械、仪表工业];
学科分类号
0802 ;
摘要
Electronic speckle pattern interferometry (ESPI) is a wholefield non-contact optical metrology technique for displacement measurement, based on the optical physics of surface-generated laser speckle. Since its inception during the early 1970s ESPI has gradually evolved into different optical designs and has been applied to a range of engineering and non-engineering applications. Development of ESPI has continued during the 1990s with the introduction of new laser and optical technology into the interferometers, allowing further optimization and extending the potential applicability of the technique. This review considers the most notable developments of interferometer design and application that have occurred and been widely published during the 1990s, and examines the current and near-future direction of research into the technique.
引用
收藏
页码:153 / 169
页数:17
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