Implementation of an optical TAP: preliminary results

被引:41
作者
Deconihout, B
Renaud, L
Da Costa, G
Bouet, M
Bostel, A
Blavette, D
机构
[1] Univ Rouen, Grp Met Phys, UMR 6634, CNRS, F-76821 Mt St Aignan, France
[2] INSA Rouen, Fac Sci, F-76821 Mt St Aignan, France
关键词
D O I
10.1016/S0304-3991(97)00164-2
中图分类号
TH742 [显微镜];
学科分类号
摘要
The FIM Group of the University of Rouen is developing a new type of detector that can be used in atom probe and 3D atom probe applications. This detector consists of an array of conductive and transparent strips covered with a phosphorescent material. After having produced light, electrons generated by ionic impacts onto microchannel plates produce signals on strips that are used for timing. At the same time, light produced by ions on the phosphor screen is recorded by means of a CCD image sensor. Then, the comparison between positions and the distribution of time of flight on the strip array makes it possible to correlate positions and times for each event. In this contribution, preliminary results obtained with a 5 x 5 cm(2) detector having eight strips will be shown. Potential capabilities and performance will be discussed. (C) 1998 Elsevier Science B.V. All rights reserved.
引用
收藏
页码:253 / 260
页数:8
相关论文
共 7 条
[1]  
BLAVETTE D, 1993, REV SCI INSTR, V64
[2]   IMPROVEMENTS IN 3-DIMENSIONAL ATOM-PROBE DESIGN [J].
CEREZO, A ;
GODFREY, TJ ;
HYDE, JM ;
SIJBRANDIJ, SJ ;
SMITH, GDW .
APPLIED SURFACE SCIENCE, 1994, 76 (1-4) :374-381
[3]   DEVELOPMENT AND INITIAL APPLICATIONS OF A POSITION-SENSITIVE ATOM PROBE [J].
CEREZO, A ;
GODFREY, TJ ;
SMITH, GDW .
JOURNAL DE PHYSIQUE, 1988, 49 (C-6) :25-30
[4]  
CEREZO A, 1996, APPL SURF SCI, V94, P453
[5]   Improvement of the detection efficiency of channel plate electron multiplier for atom probe application [J].
Deconihout, B ;
Gerard, P ;
Bouet, M ;
Bostel, A .
APPLIED SURFACE SCIENCE, 1996, 94-5 :422-427
[6]   IMPLEMENTATION OF THE OPTICAL ATOM PROBE [J].
MILLER, MK .
SURFACE SCIENCE, 1992, 266 (1-3) :494-500
[7]   COMPUTERIZED FIELD EVAPORATION MICROSCOPY [J].
MILLER, MK .
SURFACE SCIENCE, 1991, 246 (1-3) :434-441