Ultrathin protective overcoats on magnetic hard disks

被引:22
作者
Anoikin, EV [1 ]
Ng, GS
Yang, MM
Chao, JL
Elings, JR
Brown, DW
机构
[1] HMT Technol, Fremont, CA 94538 USA
[2] Digital Instruments, Santa Barbara, CA 93117 USA
[3] Diamonex, Allentown, PA 18106 USA
关键词
corrosion resistance; magnetic hard disk; nanoscale scratch resistance; protective overcoat;
D O I
10.1109/20.706682
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
Composition, structure and protective properties of 50-100 Angstrom thick hard disk overcoats prepared by DC magnetron sputtering and ion beam deposition were examined. Ion beam coatings were shown to possess superior properties as compared to the sputtered carbon films by nanoscale scratching and electrochemical corrosion techniques.
引用
收藏
页码:1717 / 1719
页数:3
相关论文
共 10 条
[1]   OPTICAL CHARACTERIZATION OF SPUTTERED CARBON-FILMS [J].
AGER, JW .
IEEE TRANSACTIONS ON MAGNETICS, 1993, 29 (01) :259-263
[2]  
AGER JW, 1997, DATA STORAE, V4, P51
[3]  
Angus JohnC., 1986, Plasma deposited thin films: Carbon thin films, P89
[4]   CHARACTERIZATION OF CHEMICAL BONDING AND PHYSICAL CHARACTERISTICS OF DIAMOND-LIKE AMORPHOUS-CARBON AND DIAMOND FILMS [J].
BHUSHAN, B ;
KELLOCK, AJ ;
CHO, NH ;
AGER, JW .
JOURNAL OF MATERIALS RESEARCH, 1992, 7 (02) :404-410
[5]  
BOGY DB, 1995, MATER RES SOC SYMP P, V356, P737
[6]   CORROSION OF THIN-FILM MAGNETIC DISK - GALVANIC EFFECTS OF THE CARBON OVERCOAT [J].
BRUSIC, V ;
RUSSAK, M ;
SCHAD, R ;
FRANKEL, G ;
SELIUS, A ;
DIMILIA, D ;
EDMONSON, D .
JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1989, 136 (01) :42-46
[7]  
Cuomo J.J., 1989, HDB ION BEAM PROCESS
[8]   CORRELATION BETWEEN ENVIRONMENTAL AND ELECTROCHEMICAL CORROSION OF THIN-FILM MAGNETIC RECORDING MEDIA [J].
NOVOTNY, V ;
STAUD, N .
JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1988, 135 (12) :2931-2938
[9]   THE DEPENDENCE OF THE CORROSION BEHAVIOR OF RIGID DISK MAGNETIC RECORDING MEDIA ON THE DEPOSITION CONDITIONS OF THE UNDERLAYER, MAGNETIC LAYER, AND CARBON OVERCOAT [J].
SIDES, PJ .
JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1992, 139 (05) :1352-1358
[10]  
WASA K, 1992, HDB SPUTTER DEPOSITI, pCH2