W-Ti-O layers for gas-sensing applications: Structure, morphology, and electrical properties

被引：12

作者：

Sangaletti, L

Bontempi, E

Depero, LE

Salari, R

Zocchi, M

Nelli, P

Sberveglieri, G

Galinetto, P

Ferroni, M

Guidi, V

Martinelli, G

机构：

[1] Univ Brescia, Ist Nazl Fis Mat, I-25123 Brescia, Italy

[2] Univ Brescia, Lab Strutturist Chim, I-25123 Brescia, Italy

[3] Univ Brescia, Dipartimento Chim & Fis Ingn & Mat, I-25133 Brescia, Italy

[4] Univ Pavia, Ist Nazl Fis Mat, I-27100 Pavia, Italy

[5] Univ Pavia, Dipartimento Fis A Volta, I-27100 Pavia, Italy

[6] Univ Ferrara, Ist Nazl Fis Mat, Ferrara, Italy

[7] Univ Ferrara, Dipartimento Fis, Ferrara, Italy

来源：

JOURNAL OF MATERIALS RESEARCH | 1998年 / 13卷 / 06期

关键词：

D O I：

10.1557/JMR.1998.0218

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

The kinetics of phase transitions and phase segregation induced by annealing temperature on the Ti-W-O gas-sensing layer was studied by x-ray diffraction, Raman spectroscopy, and scanning electron microscopy, The main goal was to identify, on the basis of kinetics studies, structurally stable Ti-WO3 thin film phases and compare their response to polluting gases in order to determine possible correlations between structural and electrical properties of the sensing layers.

引用

页码：1568 / 1575

页数：8

共 18 条

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AKIYAMA M, 1993, SENSOR ACTUAT B-CHEM, V13, P619

[2] NO2 sensitivity of WO3 thin film obtained by high vacuum thermal evaporation [J].