Structure and soft magnetic properties of sputter deposited MnZn-ferrite films

被引:38
作者
Gillies, MF
Coehoorn, R
van Zon, JBA
Alders, D
机构
[1] Philips Res Labs, NL-5656 AA Eindhoven, Netherlands
[2] Eindhoven Univ Technol, Dept Phys, NL-5600 MB Eindhoven, Netherlands
关键词
D O I
10.1063/1.367866
中图分类号
O59 [应用物理学];
学科分类号
摘要
In this paper we report the soft magnetic properties of thin films of sputtered MnZn ferrite deposited on thermally oxidized Si substrates, A high deposition temperature, 600 degrees C, together with the addition of water vapor to the sputtering gas was found to improve the initial ac permeability, mu. The highest value obtained was approximately 30. For MnZn-ferrite films with much larger grain sizes, as obtained by deposition on a polycrystalline Zn-ferrite substrate, a mu of 100 was obtained. The results are discussed in terms of the so-called nonmagnetic grain boundary model. (C) 1998 American Institute of Physics. [S0021-8979(98)53211-2].
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页码:6855 / 6857
页数:3
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