Epitaxial growth of (Sr,Ba)Nb2O6 thin films by pulsed laser deposition

被引:22
作者
Tanaka, K
Nakagawara, O
Nakano, M
Shimuta, T
Tabata, H
Kawai, T
机构
[1] Murata Mfg Co Ltd, Shiga 5202393, Japan
[2] Osaka Univ, ISIR, Ibaraki, Osaka 567, Japan
来源
JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS | 1998年 / 37卷 / 11期
关键词
ferroelectric thin films; (Sr; Ba)Nb2O6; pulsed laser deposition; epitaxial growth;
D O I
10.1143/JJAP.37.6142
中图分类号
O59 [应用物理学];
学科分类号
摘要
Thin films of (Sr, Ba)Nb2O6 (SBN) were prepared on SrTiO3 (100) substrates by a pulsed laser deposition and their crystallographic properties were investigated. Epitaxially grown films with the c-axis perpendicular to the substrate were obtained at substrate temperatures higher than 650 degrees C in an oxygen atmosphere (containing 8% O-3) of 3 mTorr. An X-ray phi scan analysis indicates that the films have antiphase domains in the c-plane and the relationship is SBN[100]//SrTiO3[310]. The lattice mismatch between the film and the substrate is less than 1%, which contributes to the desirable crystalline quality of SBN films. A smooth surface of roughness Rms = 0.8 nm was obtained by controlling the morphology of the initial growth layer in a two-step deposition.
引用
收藏
页码:6142 / 6145
页数:4
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