Simulation of infrared picosecond laser-induced electron emission from semiconductors

被引:44
作者
Mao, SS
Mao, XL
Greif, R
Russo, RE [1 ]
机构
[1] Univ Calif Berkeley, Lawrence Berkeley Lab, Berkeley, CA 94720 USA
[2] Univ Calif Berkeley, Dept Engn Mech, Berkeley, CA 94720 USA
关键词
infrared picosecond laser-induced electron emission; semiconductors; silicon;
D O I
10.1016/S0169-4332(97)00633-8
中图分类号
O64 [物理化学(理论化学)、化学物理学];
学科分类号
070304 ; 081704 ;
摘要
In this study, we present a self-consistent model for picosecond laser induced electron emission from silicon. Surface electron emission due to a pulsed laser excitation originates from thermionic and photoelectric effects, both of which depend on the surface electron temperature and incident laser pulse intensity. By numerically solving a set of coupled transport equations, time dependent surface electron temperature as well as lattice temperature was determined. The electron emission rates and electron yields due to photoelectric and thermionic effects have been studied for varying pulse width and pulse intensity. For picosecond pulses at 1064 nm, the dominant emission mechanism was found to be photoelectric emission for pulse fluences below the melting threshold. In addition, a comparison between electron emission due to the picosecond infrared pulse and a picosecond 532 nm pulse was also presented. (C) 1998 Elsevier Science B.V.
引用
收藏
页码:206 / 211
页数:6
相关论文
共 16 条
[1]  
Anismov S.I., 1974, Sov. Phys. JETP, V39, P375, DOI DOI 10.1016/J.JMATPROTEC.2009.05.031
[2]  
[Anonymous], 1984, Semiconductors Probed by Ultrafast Laser Spectroscopy
[3]  
[Anonymous], 1990, FUNDAMENTALS CARRIER
[4]   2-PHOTON PHOTOEMISSION FROM METALS INDUCED BY PICOSECOND LASER-PULSES [J].
BECHTEL, JH ;
SMITH, WL ;
BLOEMBERGEN, N .
PHYSICAL REVIEW B, 1977, 15 (10) :4557-4563
[5]  
BENSOUSSAN M, 1981, J PHYS C SOLID STATE, V7, P149
[6]   VARIOUS PHASE-TRANSITIONS AND CHANGES IN SURFACE-MORPHOLOGY OF CRYSTALLINE SILICON INDUCED BY 4-260-PS PULSES OF 1-MU-M RADIATION [J].
BOYD, IW ;
MOSS, SC ;
BOGGESS, TF ;
SMIRL, AL .
APPLIED PHYSICS LETTERS, 1984, 45 (01) :80-82
[7]  
DICKINSON JT, 1994, NUCL INSTRUM METH B, V91, P634, DOI 10.1016/0168-583X(94)96300-2
[8]  
DRABLE J, 1961, THERMAL CONDUCTION S
[9]   THERMIONIC EMISSION [J].
HERRING, C ;
NICHOLS, MH .
REVIEWS OF MODERN PHYSICS, 1949, 21 (02) :185-270
[10]  
MAO SS, UNPUB J APPL PHYS