Inorganic sensors utilizing MEMS and microelectronic technologies

被引：21

作者：

Tuller, HL ^{[1
]}

Mlcak, R

机构：

[1] MIT, Dept Mat Sci & Engn, Cambridge, MA 02139 USA

[2] Boston MicroSyst Inc, Wellesley, MA 02181 USA

来源：

CURRENT OPINION IN SOLID STATE & MATERIALS SCIENCE | 1998年 / 3卷 / 05期

关键词：

D O I：

10.1016/S1359-0286(98)80015-6

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

The most significant recent advances in achieving sensor sensitivity and selectivity have been tied to the integration of thin film sensors with micromachined and/or microelectronic technologies. Arrays of micro-hotplates, microcantilever beams and metal oxide semiconductor devices show great promise as chemical sensor platforms exhibiting enhanced selectivity and markedly reduced power dissipation. Microcantilever beams, presently under development, demonstrate exceptional sensitivity for thermal, optical and magnetic stimuli.

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页码：501 / 504

页数：4

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