Process assembly for μm-scale SLS, reaction sintering, and CVD

被引：9

作者：

Ebert, R ^{[1
]}

Regenfuss, P ^{[1
]}

Klötzer, S ^{[1
]}

Hartwig, L ^{[1
]}

Exner, H ^{[1
]}

机构：

[1] Univ Appl Sci Mittweida, Laserinst Mittelsachsen EV, D-09648 Mittweida, Germany

来源：

FOURTH INTERNATIONAL SYMPOSIUM ON LASER PRECISION MICROFABRICATION | 2003年 / 5063卷

关键词：

D O I：

10.1117/12.540466

中图分类号：

TQ174 [陶瓷工业]; TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

A novel device suited for the generation of sintered microparts of metal and ceramics, for reaction sintering and for CVD has been developed and successfully tested. With the production of a functional component it has evidenced professional performance. The set-up is vacuum tight; unstable substances can be processed under various shield gases and pressures; it is equipped with a device suited to rake thin layers of fine powders as well as slurries. Sub micrometer powder can be processed in steps of 1 mum thick sintered layers. In combination with a proprietary sintering regime, micro parts with a structural resolution of <30mum, and aspect ratios of >10 have been achieved.

引用

页码：183 / 188

页数：6