Low temperature deposited L10 FePt-C (001) films with high coercivity and small grain size

被引:134
作者
Chen, J. S.
Lim, B. C.
Hu, J. F.
Liu, B.
Chow, G. M.
Ju, G.
机构
[1] Data Storage Inst, Singapore 117608, Singapore
[2] Natl Univ Singapore, Dept Mat Sci & Engn, Singapore 117576, Singapore
[3] Seagate Technol, Pittsburgh, PA 15222 USA
关键词
D O I
10.1063/1.2789790
中图分类号
O59 [应用物理学];
学科分类号
摘要
FePt-C films with high coercivity, (001) texture, and small grain size were deposited on MgO/CrRu/glass substrate by cosputtering FePt and carbon at 350 degrees C. The out-of-plane coercivity measured at room temperature increased from 9.6 to 15.1 kOe when C concentrations increased from 0% to 15%. Further increasing the C contents to 20% and 25% caused the decrease of coercivity to 13.6 and 11.8 kOe, respectively. With C doping, a two-layer structure of FePt-C films was formed and fcc-phase FePt particles were found. By optimizing the sputtering process, FePt-C (001) film with coercivity higher than 14.4 kOe and columnar FePt grains of 7.5 nm in diameter was obtained, which are suitable for ultrahigh density perpendicular recording.
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页数:3
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