Preparation of nanoscale gold structures by nanolithography

被引:24
作者
Stokes, Nicholas [1 ]
McDonagh, Andrew M. [1 ]
Cortie, Michael B. [1 ]
机构
[1] Univ Technol Sydney, Inst Nanoscale Technol, Sydney, NSW 2007, Australia
关键词
D O I
10.1007/BF03215605
中图分类号
O61 [无机化学];
学科分类号
070301 ; 081704 ;
摘要
Gold is the material of first choice for the realisation of a large number of interesting nanoscale devices and structures due to its unique chemical and optical properties. However, conventional photolithographic processes cannot be used to manufacture such tiny structures in gold (or any other material) due to limitations imposed by the diffraction of light. New methods of lithography have been developed to overcome this limitation. In this article we review these new nanolithographic techniques, describe how they have been used to produce nanoscale precious metal artefacts, and briefly survey some of the existing and potential applications for these structures.
引用
收藏
页码:310 / 320
页数:11
相关论文
共 73 条
[1]  
Alkaisi MM, 2001, ADV MATER, V13, P877, DOI 10.1002/1521-4095(200107)13:12/13<877::AID-ADMA877>3.0.CO
[2]  
2-W
[3]   Super-resolution near-field lithography using planar silver lenses: A review of recent developments [J].
Blaikie, Richard J. ;
Melville, David O. S. ;
Alkaisi, Maan M. .
MICROELECTRONIC ENGINEERING, 2006, 83 (4-9) :723-729
[4]   Why optical lithography will live forever [J].
Brunner, TA .
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 2003, 21 (06) :2632-2637
[5]   X-ray imaging: applications to patterning and lithography [J].
Cerrina, F .
JOURNAL OF PHYSICS D-APPLIED PHYSICS, 2000, 33 (12) :R103-R116
[6]   Immersion zone-plate-array lithography [J].
Chao, D ;
Patel, A ;
Barwicz, T ;
Smith, HI ;
Menon, R .
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 2005, 23 (06) :2657-2661
[7]  
Chen Y, 2001, ELECTROPHORESIS, V22, P187, DOI 10.1002/1522-2683(200101)22:2<187::AID-ELPS187>3.0.CO
[8]  
2-0
[9]   GaN focused ion beam micromachining with gas-assisted etching [J].
Chyr, I ;
Steckl, AJ .
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 2001, 19 (06) :2547-2550
[10]   The weird world of nanoscale gold [J].
Cortie, MB .
GOLD BULLETIN, 2004, 37 (1-2) :12-19