Sublimation and deposition behaviour of palladium (II) acetylacetonate

被引：13

作者：

Cominos, V ^{[1
]}

Gavriilidis, A ^{[1
]}

机构：

[1] UCL, Dept Chem Engn, London WC1E 7JE, England

来源：

EUROPEAN PHYSICAL JOURNAL-APPLIED PHYSICS | 2001年 / 15卷 / 01期

关键词：

D O I：

10.1051/epjap:2001164

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

Sublimation and deposition of the metal-organic complex palladium (II) acetylacetonate [Pd(acac)(2)] was investigated through thermogravimetry and XRD. The temperature range for sublimation, avoiding thermal decomposition, was determined to be 100-160 degreesC and required to take place in the presence of an inert gas such as helium. The complex was found to be highly unstable in the presence of hydrogen. The Clausius-Clapeyron equation determined is ln P = 96 x 10(3)/RT + 29:26. Deposition of the complex on monolithic substrates required the presence of adsorption sites. For the system investigated, change of the apparent deposition activation energy was found to take place within the range 100-150 degreesC. To obtain Pd metal particles, the precursor was reduced in hydrogen at a subsequent stage and temperatures close to room temperature were found to be sufficient.

引用

页码：23 / 33

页数：11

共 36 条

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[2]

[Anonymous], 1993, CHEM VAPOR DEPOSITIO

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