Improvement of electric-field-assisted ion exchange method for planar microlens array fabrication

被引：5

作者：

Katayama, T ^{[1
]}

Munetaka, Y ^{[1
]}

Iga, K ^{[1
]}

机构：

[1] Tokyo Inst Technol, Precis & Intelligence Lab, Midori Ku, Yokohama, Kanagawa 2268503, Japan

来源：

JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS | 1999年 / 38卷 / 2A期

关键词：

micro-optics; planar microlens; electric-field-assisted ion exchange;

D O I：

10.1143/JJAP.38.775

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

We propose a new processing technique to reproducibly fabricate gradient-index planar microlenses. A uniform microlens array consisting of 300 l-mm-diameter microlenses was successfully realized.

引用

页码：775 / 776

页数：2

共 3 条

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[3] DISTRIBUTED-INDEX PLANAR MICROLENS ARRAY PREPARED FROM DEEP ELECTROMIGRATION [J].

OIKAWA, M ;

IGA, K ;

SANADA, T .

ELECTRONICS LETTERS, 1981, 17 (13) :452-454

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