Electrical and mechanical properties of surfactant-templated mesoporous silica thin films using Brij-76 surfactant

被引：21

作者：

Jung, SB ^{[1
]}

Han, CK ^{[1
]}

Park, HH ^{[1
]}

机构：

[1] Yonsei Univ, Dept Ceram Engn, Seokaemun Ku, Seoul 120749, South Korea

来源：

APPLIED SURFACE SCIENCE | 2005年 / 244卷 / 1-4期

关键词：

low-k; ordered; mesoporous silica films; Brij-76; surfactant;

D O I：

10.1016/j.apsusc.2004.09.127

中图分类号：

O64 [物理化学（理论化学）、化学物理学];

学科分类号：

070304 ; 081704 ;

摘要：

Ordered mesoporous silica films using Brij-76 surfactant were prepared from self-assembly of organic-inorganic species and their electrical/mechanical properties were investigated for low-k application. X-ray diffraction pattern revealed highly textured pore structure. Adequate dielectric properties could be realized by controlling the chemical species of silica wall. Porosity of mesoporous silica film was 39 +/- 2% and elastic modulus and hardness of the film were 14.4 and 1.25 GPa, respectively. The dielectric constant and leakage current density were measured as 2.55 and less than 2 x 10(-6) A/cm(2) up to 1.6 MV/cm, respectively. (c) 2004 Elsevier B.V. All rights reserved.

引用

页码：47 / 50

页数：4

共 12 条

[1] STRUCTURAL INVESTIGATION OF SILICA-GEL FILMS BY INFRARED-SPECTROSCOPY [J].

ALMEIDA, RM ;

PANTANO, CG .

JOURNAL OF APPLIED PHYSICS, 1990, 68 (08) :4225-4232

[2]

Brinker CJ, 1999, ADV MATER, V11, P579, DOI 10.1002/(SICI)1521-4095(199905)11:7<579::AID-ADMA579>3.3.CO

[3]

2-I

[4]

BRINKER CJ, 1990, SOL GEL SCI, P213

[5] Calculation of various physics constants in heterogenous substances I Dielectricity constants and conductivity of mixed bodies from isotropic substances [J].

Bruggeman, DAG .

ANNALEN DER PHYSIK, 1935, 24 (07) :636-664

[6]

Chiang SK, 1999, SOLID STATE TECHNOL, V42, P42

[7] Self-assembled aerogel-like low dielectric constant films [J].

Fan, HY ;

Bentley, HR ;

Kathan, KR ;

Clem, P ;

Lu, YF ;

Brinker, CJ .

JOURNAL OF NON-CRYSTALLINE SOLIDS, 2001, 285 (1-3) :79-83

[8] Order-disorder transitions and evolution of silica structure in self-assembled mesostructured silica films studied through FTIR spectroscopy [J].

Innocenzi, P ;

Falcaro, P ;

Grosso, D ;

Babonneau, F .

JOURNAL OF PHYSICAL CHEMISTRY B, 2003, 107 (20) :4711-4717

[9] TRANSMISSION INFRARED STUDY OF ACID-CATALYZED SOL-GEL SILICA COATINGS DURING ROOM AMBIENT DRYING [J].

PARRILL, TM .

JOURNAL OF MATERIALS RESEARCH, 1992, 7 (08) :2230-2239

[10] Three-dimensional cubic mesoporous structures of SBA-12 and related materials by electron crystallography [J].

Sakamoto, Y ;

Díaz, I ;

Terasaki, O ;

Zhao, DY ;

Pérez-Pariente, J ;

Kim, JM ;

Stucky, GD .

JOURNAL OF PHYSICAL CHEMISTRY B, 2002, 106 (12) :3118-3123

← 1 2 →