Determination of the thermal conductivity of diamond-like nanocomposite films using a scanning thermal microscope

被引:75
作者
Ruiz, F [1 ]
Sun, WD
Pollak, FH
Venkatraman, C
机构
[1] CUNY Brooklyn Coll, Dept Phys, Brooklyn, NY 11210 USA
[2] CUNY Brooklyn Coll, New York State Ctr Adv Technol Ultrafast Photon M, Brooklyn, NY 11210 USA
[3] Adv Refractory Technol Inc, Buffalo, NY 14207 USA
[4] Univ Autonoma San Luis Potosi, San Luis Potosi 78000, Mexico
[5] CUNY Grad Sch & Univ Ctr, New York, NY 10036 USA
关键词
D O I
10.1063/1.122287
中图分类号
O59 [应用物理学];
学科分类号
摘要
Amorphous "diamond-like/quartz-like'' composites a-(C:H/Si:O) constitute a novel class of diamond-related materials with a number of unique bulk and surface properties. Using a thermal imaging microscope we have determined the thermal conductivity (kappa(s))of a-C:H/Si:O) films deposited on Si(001) substrates. We have developed a calibration procedure which makes it possible to use this method for the evaluation of not only topographical variations in kappa(s) but also absolute values. (C) 1998 American Institute of Physics. [S0003-6951(98)00339-8].
引用
收藏
页码:1802 / 1804
页数:3
相关论文
共 13 条
[1]   POSITRON-ANNIHILATION STUDIES OF DIAMOND-LIKE NANOCOMPOSITE FILMS [J].
ASOKAKUMAR, P ;
DORFMAN, BF ;
ABRAIZOV, MG ;
YAN, D ;
POLLAK, FH .
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A, 1995, 13 (03) :1044-1047
[2]  
DORFMAN B, 1994, MATER RES SOC SYMP P, V349, P547, DOI 10.1557/PROC-349-547
[3]  
DORFMAN B, 1994, MATER RES SOC SYMP P, V351, P43, DOI 10.1557/PROC-351-43
[4]  
DORFMAN B, 1995, NIST SPECIAL PUBLICA, V885, P769
[5]   DIAMOND-LIKE NANOCOMPOSITES (DLN) [J].
DORFMAN, VF .
THIN SOLID FILMS, 1992, 212 (1-2) :267-273
[6]   DIAMOND-LIKE NANOCOMPOSITES - ELECTRONIC TRANSPORT MECHANISMS AND SOME APPLICATIONS [J].
DORFMAN, VF ;
BOZHKO, A ;
PYPKIN, BN ;
BORRA, RT ;
SRIVATSA, AR ;
ZHANG, H ;
SKOTHEIM, TA ;
KHAN, I ;
RODICHEV, D ;
KIRPILENKO, G .
THIN SOLID FILMS, 1992, 212 (1-2) :274-281
[7]  
FELDMAN A, 1995, NIST SPEC PUBL, V885, P769
[8]  
GRAEBNER JE, 1995, NIST SPEC PUBL, V885, P557
[9]   Sub-surface imaging by scanning thermal microscopy [J].
Hammiche, A ;
Pollock, HM ;
Song, M ;
Hourston, DJ .
MEASUREMENT SCIENCE AND TECHNOLOGY, 1996, 7 (02) :142-150
[10]   Localized thermal analysis using a miniaturized resistive probe [J].
Hammiche, A ;
Reading, M ;
Pollock, HM ;
Song, M ;
Hourston, DJ .
REVIEW OF SCIENTIFIC INSTRUMENTS, 1996, 67 (12) :4268-4274