Fourier-transform design and electron cyclotron resonance plasma-enhanced deposition of lossy graded-index optical coatings

A Fourier-transform synthesis technique is applied to the design of inhomogeneous refractive-index optical thin films with dispersion of refractive index and absorption taken into account. Using measured properties of SiOxNy, we have designed a broadband reflector and two three-line filters with high reflectance. One of the three-line filters was manufactured by electron cyclotron resonance plasma-enhanced chemical vapor deposition from a mixture of SiH4, N-2, O-2, and Ar. Good agreement between design and measured performance proves the feasibility of applying the Fourier-transform technique to the design of reflection filters even in the case of highly dispersive, absorbing material, if its optical properties are well characterized. (C) 1996 Optical Society of America