Low-temperature plasma processing of materials: Past, present, and future

被引：179

作者：

d'Agostino, R ^{[1
]}

Favia, P

Oehr, C

Wertheimer, MR

机构：

[1] Univ Bari, Bari, Italy

[2] Fraunhofer Inst Interfacial Engn & Biotechnol, Stuttgart, Germany

[3] Ecole Polytech, Montreal, PQ H3C 3A7, Canada

来源：

PLASMA PROCESSES AND POLYMERS | 2005年 / 2卷 / 01期

关键词：

D O I：

10.1002/ppap.200400074

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

Plasma, considered as the fourth state of matter, is playing a key role as a modern discipline. Plasma processing is drawing attention from various technology sectors such as microelectronics, automotive, and surface modifications of polymers. Some examples of additional new applications include functional coatings for architectural glass, mercury-free lamps, plasma-treated packaging for food, beverage and pharmaceutical industries, as well as nanomaterials. With the emergence of all new technological applications from basic research in academic, industrial, or government laboratories, plasma is set to have a brilliant future.

引用

页码：7 / 15

页数：9

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