Micromechanical optical switches based on thermocapillary integrated in waveguide substrate

被引：42

作者：

Makihara, M ^{[1
]}

Sato, M ^{[1
]}

Shimokawa, F ^{[1
]}

Nishida, Y ^{[1
]}

机构：

[1] NTT, Optoelect Labs, Tokyo 1808585, Japan

来源：

JOURNAL OF LIGHTWAVE TECHNOLOGY | 1999年 / 17卷 / 01期

关键词：

optical switch; thermocapillary; waveguide;

D O I：

10.1109/50.737415

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

This paper proposes micromechanical optical switches which are suitable for integration in an optical waveguide substrate. The switching mechanism is based on the capillary effect induced by a temperature gradient. The switch has a simple structure which consists of a oil filled slit and a pair of microheaters. We designed two types of thermocapillary optical switches. One was a bubble-driven type, the other was an oil-column-driven type. We fabricated both types of 1 x 3 micro-switches and demonstrated excellent optical switching and self-latching performance.

引用

页码：14 / 18

页数：5

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