Synthesis and mechanical wear studies of ultra smooth nanostructured diamond (USND) coatings deposited by microwave deposition with He/H2/CH4/N2 mixtures plasma chemical vapor

被引:20
作者
Chowdhury, S. [1 ]
Borham, J. [1 ]
Catledge, S. A. [1 ]
Eberhardt, A. W. [2 ]
Johnson, P. S. [2 ]
Vohra, Y. K. [1 ]
机构
[1] Univ Alabama, Dept Phys, Birmingham, AL 35294 USA
[2] Univ Alabama, Dept Biomed Engn, Birmingham, AL 35294 USA
关键词
nanostructure; diamond films; plasma CVD; wear;
D O I
10.1016/j.diamond.2007.08.041
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
Ultra smooth nanostructured diamond (USND) coatings were deposited by microwave plasma chemical vapor deposition (MPCVD) technique using He/H-2/CH4/N-2 gas mixture. The RMS surface roughness as low as 4 nm (2 micron square area) and grain size of 5-6 nm diamond coatings were achieved on medical grade titanium alloy. Previously it was demonstrated that the C-2 species in the plasma is responsible for the production of nanocrystalline diamond coatings in the Ar/H-2/CH4 gas mixture. In this work we have found that CN species is responsible for the production of USND coatings in He/H-2/CH4/N-2 plasma. It was found that diamond coatings deposited with higher CN species concentration (normalized by Balmer H-alpha line) in the plasma produced smoother and highly nanostructured diamond coatings. The correlation between CN/H-alpha ratios with the coating roughness and grain size were also confirmed with different set of gas flows/ plasma parameters. It is suggested that the presence of CN species could be responsible for producing nanocrystallinity in the growth of USND coatings using He/H-2/CH4/N-2 gas mixture. The RMS roughness of 4 nm and grain size of 5-6 nm were calculated from the deposited diamond coatings using the gas mixture which produced the highest CN/H-alpha species in the plasma. Wear tests were performed on the OrthoPOD (R), a six station pin-on-disk apparatus with ultra-high molecular weight polyethylene (UHMWPE) pins articulating on USND disks and CoCrMo alloy disk. Wear of the UHMWPE was found to be lower for the polyethylene on USND than that of polyethylene on CoCrMo alloy. Published by Elsevier B.V.
引用
收藏
页码:419 / 427
页数:9
相关论文
共 23 条
[1]   HFCVD diamond grown with added nitrogen: film characterization and gas-phase composition studies [J].
Afzal, A ;
Rego, CA ;
Ahmed, W ;
Cherry, RI .
DIAMOND AND RELATED MATERIALS, 1998, 7 (07) :1033-1038
[2]   Influence of nitrogen additions on hot-filament chemical vapor deposition of diamond [J].
Bohr, S ;
Haubner, R ;
Lux, B .
APPLIED PHYSICS LETTERS, 1996, 68 (08) :1075-1077
[3]  
BRAGDON CR, 1996, IMECHE H, V210, P157
[4]  
CATLEDGE SA, 2001, ASTM STP, V1413
[5]   Synthesis of ultrasmooth nanostructured diamond films by microwave plasma chemical vapor deposition using a He/H2/CH4/N2 gas mixture [J].
Chowdhury, S. ;
Hillman, Damon A. ;
Catledge, Shane A. ;
Konovalov, Valery V. ;
Vohra, Yogesh K. .
JOURNAL OF MATERIALS RESEARCH, 2006, 21 (10) :2675-2682
[6]   THE DETERMINATION OF FILM HARDNESS FROM THE COMPOSITE RESPONSE OF FILM AND SUBSTRATE TO NANOMETER SCALE INDENTATIONS [J].
FABES, BD ;
OLIVER, WC ;
MCKEE, RA ;
WALKER, FJ .
JOURNAL OF MATERIALS RESEARCH, 1992, 7 (11) :3056-3064
[7]   Nanocrystalline diamond films [J].
Gruen, DM .
ANNUAL REVIEW OF MATERIALS SCIENCE, 1999, 29 :211-259
[8]   DEPOSITION AND CHARACTERIZATION OF NANOCRYSTALLINE DIAMOND FILMS [J].
GRUEN, DM ;
PAN, XZ ;
KRAUSS, AR ;
LIU, SZ ;
LUO, JS ;
FOSTER, CM .
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1994, 12 (04) :1491-1495
[9]  
HALLING J, 1982, TRIBOLOGIA, V1, P15, DOI DOI 10.1016/0040-6090(83)90496-0
[10]  
HILL MR, J BIOMED B IN PRESS