Diagnostics and modeling of strained fuel-rich acetylene/oxygen flames used for diamond deposition

被引：29

作者：

Glumac, NG ^{[1
]}

Goodwin, DG ^{[1
]}

机构：

[1] CALTECH, DIV ENGN & APPL SCI, PASADENA, CA 91125 USA

来源：

COMBUSTION AND FLAME | 1996年 / 105卷 / 03期

关键词：

D O I：

10.1016/0010-2180(95)00214-6

中图分类号：

O414.1 [热力学];

学科分类号：

摘要：

Low pressure (35 torr) strained acetylene/oxygen flames similar to those used for diamond chemical vapor deposition are studied using laser-induced fluorescence (LIF) and mass spectrometry. Relative OH concentration and OH rotational temperature profiles are obtained by LIF, while absolute mole fractions of C2H2, CH4, H-2, and CO are measured at the substrate by mass spectrometry. The results of the diagnostics are compared with the predictions of a one-dimensional strained flame code. The agreement between model prediction and experiment is generally good and usually within experimental uncertainties.

引用

页码：321 / 331

页数：11

共 47 条

[1] [Anonymous], 1992, SAND918230 SAND NAT
[2] BRENNER DW, 1992, MATER RES SOC SYMP P, V278, P255, DOI 10.1557/PROC-278-255
[3] THIN-FILM DIAMOND GROWTH MECHANISMS
BUTLER, JE
WOODIN, RL
[J]. PHILOSOPHICAL TRANSACTIONS OF THE ROYAL SOCIETY OF LONDON SERIES A-MATHEMATICAL PHYSICAL AND ENGINEERING SCIENCES, 1993, 342 (1664): : 209 - 224
[4] DIAMOND GROWTH IN O-2 + C2H4 AND O2 + C2H2 FLAMES
CARRINGTON, WA
HANSSEN, LM
SNAIL, KA
OAKES, DB
BUTLER, JE
[J]. METALLURGICAL TRANSACTIONS A-PHYSICAL METALLURGY AND MATERIALS SCIENCE, 1989, 20 (07): : 1282 - 1284
[5] COOPER JA, 1990, DIAMOND OPTICS, V3, P41
[6] EXTINCTION OF STRAINED PREMIXED PROPANE-AIR FLAMES WITH COMPLEX CHEMISTRY
DARABIHA, N
CANDEL, SM
GIOVANGIGLI, V
SMOOKE, MD
[J]. COMBUSTION SCIENCE AND TECHNOLOGY, 1988, 60 (4-6) : 267 - 285
[7] DISMUKES JP, 1991, MATER SCI MONOG, V73, P635
[8] DIXONLEWIS G, 1990, 23 S INT COMB COMB I, P305
[9] OH AND CH PROFILES IN A 10 TORR METHANE OXYGEN FLAME - EXPERIMENT AND FLAME MODELING
FLEMING, JW
BURTON, KA
LADOUCEUR, HD
[J]. CHEMICAL PHYSICS LETTERS, 1990, 175 (04) : 395 - 400
[10] EXTINCTION OF STRAINED PREMIXED LAMINAR FLAMES WITH COMPLEX CHEMISTRY
GIOVANGIGLI, V
SMOOKE, MD
[J]. COMBUSTION SCIENCE AND TECHNOLOGY, 1987, 53 (01) : 23 - 49

← 1 2 3 4 5 →