Large format SWIR/MWIR HgCdTe infrared focal plane arrays for astronomy

被引：2

作者：

Vural, K ^{[1
]}

Kozlowski, LJ ^{[1
]}

Cabelli, C ^{[1
]}

Cabelli, SA ^{[1
]}

Chen, AC ^{[1
]}

Cooper, DE ^{[1
]}

Bostrup, G ^{[1
]}

Bailey, RB ^{[1
]}

Edwall, DE ^{[1
]}

Arias, JM ^{[1
]}

Stanley, GA ^{[1
]}

Price, GG ^{[1
]}

Pinter, JA ^{[1
]}

Kleinhans, WE ^{[1
]}

Hodapp, K ^{[1
]}

Hall, D ^{[1
]}

机构：

[1] Rockwell Sci Ctr, Thousand Oaks, CA 91360 USA

来源：

INFRARED DETECTORS AND FOCAL PLANE ARRAYS V | 1998年 / 3379卷

关键词：

infrared; FPA; HgCdTe; IR astronomy; MBE; 1024x1024; 2048x2048;

D O I：

10.1117/12.317624

中图分类号：

V [航空、航天];

学科分类号：

08 ; 0825 ;

摘要：

We have developed 1024x1024 HAWAII (HgCdTe Arrays for Wide-field Astronomical Infrared Imaging) focal plane arrays (FPAs) for use in astronomical applications. These devices have been delivered to various astronomy organizations around the world and have resulted in increased sensitivities and decreased observation times for deep space imaging. The detector material is PACE-I for SWIR and Molecular Beam Epitaxy (MBE) HgCdTe on CdZnTe for MWIR. The 1024x1024 multiplexer has a 18.5 mu m unit cell pitch, source follower per detector (SFD) input, and it was fabricated at our internal commercial CMOS process line with excellent yield. Mean dark currents as low as 0.02 e-/s have been measured at 77K for 2.5 mu m devices (1024x1024 format, 18.5 mu m pitch) and 0.39 e-/s for 5.3 mu m devices at 50K (256x256 format, 40 mu m pitch). Quantum efficiencies are >50% for both SWIR and MWIR detectors; with AR coatings, these are expected to be above 75%. Noise levels of 3 e- have been measured by multiple sampling techniques for the SWIR and 75 e- for the MWIR. All of these devices are simple to operate and are readily available. We are presently developing 2048x2048 FPAs with 18 mu m unit cell pitch for both SWIR and MWIR applications.

引用

页码：562 / 571

页数：10