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Nuclear magnetic resonance studies of hydrogen in amorphous silicon
被引：11
作者：
Norberg, RE
Fedders, PA
Leopold, DJ
机构：
来源：
AMORPHOUS SILICON TECHNOLOGY - 1996
|
1996年
/
420卷
关键词：
D O I：
10.1557/PROC-420-475
中图分类号：
TM [电工技术];
TN [电子技术、通信技术];
学科分类号：
0808 ;
0809 ;
摘要：
Proton and deuteron NMR in hydrogenated amorphous silicon yield quantitative measures of species-specific structural configurations and their dynamics. Populations of silicon-bonded and molecular hydrogens correlate with photovoltaic quality, doping, illumination/dark anneal sequences, and with infrared and other characterizations. High quality films contain substantial populations of nanovoid-trapped molecular hydrogen.
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页码：475 / 483
页数：9
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