Coplanar ac discharges between cylindrical electrodes with a nanoporous alumina dielectric: Modular dielectric barrier plasma devices

被引:7
作者
Cho, JH [1 ]
Lee, KW
Park, SJ
Eden, JG
机构
[1] Myongji Univ, Dept Chem, Yongin, South Korea
[2] Univ Illinois, Dept Elect & Comp Engn, Lab Opt Phys & Engn, Urbana, IL 61801 USA
关键词
dielectric barrier discharges; nanoporous alumina; plasmas;
D O I
10.1109/TPS.2005.845284
中图分类号
O35 [流体力学]; O53 [等离子体物理学];
学科分类号
070204 ; 080103 ; 080704 ;
摘要
Dielectric barrier discharges between coplanar Al rods having an similar to 2-mu m-thick layer of nanoporous alumina dielectric at the surface have been investigated. Rods 3 mm in diameter, 7 cm in length, and spaced by 5 mm produce stable and intense glow discharges in 50 torr of Ne when pairs of rods are driven by an alternating current (bipolar) waveform for which the peak voltage is similar to 460-510 V.
引用
收藏
页码:378 / 379
页数:2
相关论文
共 3 条
[1]   Self-organized formation of hexagonal pore arrays in anodic alumina [J].
Jessensky, O ;
Muller, F ;
Gosele, U .
APPLIED PHYSICS LETTERS, 1998, 72 (10) :1173-1175
[2]   ORDERED METAL NANOHOLE ARRAYS MADE BY A 2-STEP REPLICATION OF HONEYCOMB STRUCTURES OF ANODIC ALUMINA [J].
MASUDA, H ;
FUKUDA, K .
SCIENCE, 1995, 268 (5216) :1466-1468
[3]   The barrier discharge: basic properties and applications to surface treatment [J].
Wagner, HE ;
Brandenburg, R ;
Kozlov, KV ;
Sonnenfeld, A ;
Michel, P ;
Behnke, JF .
VACUUM, 2003, 71 (03) :417-436