Films of manganese doped zinc silicate have been deposited using the charged liquid cluster beam technique. The deposition conditions were found to have a large impact on the morphology and photoluminescence intensity of these films. The photoluminescence intensity was maximized at a manganese content near delta=0.04 in (Zn1-deltaMndelta)(2)SiO4. No phases other than zinc silicate were detectable with manganese contents up to delta=0.08. (C) 1998 American Institute of Physics. [S0003-6951(98)00641-X].