Deposition of (Zn,Mn)2SiO4 for plasma display panels using charged liquid cluster beam

被引:71
作者
Cich, M
Kim, K
Choi, H
Hwang, ST
机构
[1] Univ Illinois, Dept Elect & Comp Engn, Thin Film & Charged Particle Res Lab, Urbana, IL 61801 USA
[2] Univ Illinois, Beckman Inst Adv Sci & Technol, Urbana, IL 61801 USA
[3] Univ Illinois, Dept Mat Sci & Engn, Urbana, IL 61801 USA
关键词
D O I
10.1063/1.122396
中图分类号
O59 [应用物理学];
学科分类号
摘要
Films of manganese doped zinc silicate have been deposited using the charged liquid cluster beam technique. The deposition conditions were found to have a large impact on the morphology and photoluminescence intensity of these films. The photoluminescence intensity was maximized at a manganese content near delta=0.04 in (Zn1-deltaMndelta)(2)SiO4. No phases other than zinc silicate were detectable with manganese contents up to delta=0.08. (C) 1998 American Institute of Physics. [S0003-6951(98)00641-X].
引用
收藏
页码:2116 / 2118
页数:3
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