Fabrication of nano-gold islands with μm spacing using 2.5 dimensional PDMS stamps

被引:8
作者
Schwinger, Wolfgang [1 ]
Lausecker, Elisabeth [1 ,2 ]
Bergmair, Iris [1 ]
Grydlik, Martyna [2 ]
Fromherz, Thomas [2 ]
Hasenfuss, Christine [2 ]
Schoeftner, Rainer [1 ]
机构
[1] Profactor Produktionsforsch GmbH, A-4407 Steyr Gleink, Austria
[2] Univ Linz, Inst Semicond Phys, A-4040 Linz, Austria
关键词
microcontact printing; mu CP; Gold islands; nano-islands; nano-contact printing; nCP;
D O I
10.1016/j.mee.2008.01.039
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
Gold islands with diameters in the range of several tens of nanometers with mu m spacing may act as binding sites for adapter molecules used for single molecule detection using optical fluorescence readout. Microcontact printing (mu CP) using PDMS stamps and alkanethiol chemistry is a straightforward method for the structuring of gold layers. When using binary two dimensional (2D) stamps the softness of the elastomer limits the useable aspect ratio and it was shown that nm-sized features with mu m spacing cannot be replicated with binary PDMS stamps. To bypass this limitation we used 2.5 dimensional PDMS stamps with pyramidal shaped topography to fabricate sub-100 nm gold islands with a spacing of 6 mu m on areas of several square millimeters. The masters, the stamps and the resulting gold structures were analyzed using scanning electron microscopy (SEM). (c) 2008 Elsevier B.V. All rights reserved.
引用
收藏
页码:1346 / 1349
页数:4
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