Trioxane derivative as an acid amplifier exhibiting a non-linear organic reaction

被引：18

作者：

Arimitsu, K ^{[1
]}

Ichimura, K ^{[1
]}

机构：

[1] Tokyo Inst Technol, Resources Utilizat Res Lab, Midori Ku, Yokohama, Kanagawa 2268503, Japan

来源：

CHEMISTRY LETTERS | 1998年 / 08期

关键词：

D O I：

10.1246/cl.1998.823

中图分类号：

O6 [化学];

学科分类号：

0703 ;

摘要：

2,4,6-Tris[2-(p-toluenesulfonyloxy)ethy]-1,3,5-trioxane was prepared to be subjected to the acid-catalyzed decomposition to release three p-toluenesulfonic acid molecules which were able to act as an acid amplifier to enhance the photosensitivity of a chemically amplified photoresist.

引用

页码：823 / 824

页数：2

共 9 条

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