Laser processing of adhesives and polymeric materials for microelectronics packaging applications

被引:13
作者
Illyefalvi-Vitéz, Z [1 ]
机构
[1] Budapest Univ Technol & Econ, Dept Elect Technol, H-1111 Budapest, Hungary
来源
4TH INTERNATIONAL CONFERENCE ON ADHESIVE JOINING AND COATING TECHNOLOGY IN ELECTRONICS MANUFACTURING - PROCEEDINGS | 2000年
关键词
laser drilling; via generation; laser drilling of adhesive layers; PWBs;
D O I
10.1109/ADHES.2000.860622
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
The microelectronics industry is moving toward smaller feature sizes. The main driving forces are to improve performance and to lower cost. From the performance point of view the small distances between chips together with the short interconnection routes have of great importance in order to achieve faster operation. The application of polymers, including electrically and/or thermally conductive and insulating polymeric adhesives, for functional insulating and protective layers of interconnect substrates is beneficial to the performance and to the cost of a circuit module as well. Laser processing of polymeric materials applied for via generation, image transfer contour cutting, Etc. has proved to be an efficient tool for the fabrication of interconnects substrates. The paper will describe the results of research projects that aimed at the application of CO2 and frequency multiplied Nd:YAC lasers for drilling of polyester foils and glass fiber reinforced epoxy laminates with the aim of interconnect via preparation. The physics of processing using five wavelengths, ie. 10600 1064, 532, 355 and 266 nm, were modeled, Examined and Evaluated. Through contacting were carried out by screen-printing with polymer thick films, by wet chemical direct plating and by evaporation of thin metal layers, but the details of metallization are not given here. The conclusion will refer to the possibilities and limitations of laser processing of polymeric materials in microelectronics packaging applications.
引用
收藏
页码:289 / 295
页数:7
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