Dielectric properties of BaTiO3/SrTiO3 superlattices measured with interdigital electrodes and electromagnetic field analysis

被引:70
作者
Harigai, T [1 ]
Tanaka, D [1 ]
Kakemoto, H [1 ]
Wada, S [1 ]
Tsurumi, T [1 ]
机构
[1] Tokyo Inst Technol, Grad Sch Sci & Engn, Dept Met & Ceram Sci, Meguro Ku, Tokyo 1528552, Japan
关键词
D O I
10.1063/1.1625780
中图分类号
O59 [应用物理学];
学科分类号
摘要
Artificial BaTiO3(BTO)/SrTiO3(STO) superlattices on STO substrates were fabricated by the molecular beam epitaxy process. The capacitance and the complex admittance of superlattices with interdigital electrode structures were measured at 1-110 MHz. The dielectric properties of the superlattices were evaluated by the electromagnetic analysis. It was found that the dielectric permittivity changed with the structure of superlattices and the highest permittivity of 33 000 was obtained for [(BTO)(10)/(STO)(10)](4) superlattice from 1 to 110 MHz. (C) 2003 American Institute of Physics.
引用
收藏
页码:7923 / 7925
页数:3
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