Portable microsensors based on individual SnO2 nanowires

被引：50

作者：

Hernandez-Ramirez, F. ^{[1
]}

Prades, J. D. ^{[1
]}

Tarancon, A. ^{[1
]}

Barth, S. ^{[2
,3
]}

Casals, O. ^{[1
]}

Jimenez-Diaz, R. ^{[1
]}

Pellicer, E. ^{[1
]}

Rodriguez, J. ^{[1
]}

Juli, M. A. ^{[1
]}

Romano-Rodriguez, A. ^{[1
]}

Morante, J. R. ^{[1
]}

Mathur, S. ^{[2
,3
]}

Helwig, A. ^{[4
]}

Spannhake, J. ^{[4
]}

Mueller, G. ^{[4
]}

机构：

[1] Univ Barcelona, EME IN2UB, Dept Elect, E-08028 Barcelona, Spain

[2] Leiden Inst New Mat, Dept Nanocrystalline Mat & Thin Film Syst, D-66123 Saarbrucken, Germany

[3] Wuerzburg Univ, Dept Chem, D-97074 Wurzburg, Germany

[4] EADS Innovat Works, Dept Sensors Eleect & Syst Integrat, D-81663 Munich, Germany

来源：

NANOTECHNOLOGY | 2007年 / 18卷 / 49期

关键词：

D O I：

10.1088/0957-4484/18/49/495501

中图分类号：

TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

Individual SnO2 nanowires were integrated in suspended micromembrane-based bottom-up devices. Electrical contacts between the nanowires and the electrodes were achieved with the help of electron- and ion-beam-assisted direct-write nanolithography processes. The stability of these nanomaterials was evaluated as function of time and applied current, showing that stable and reliable devices were obtained. Furthermore, the possibility of modulating their temperature using the integrated microheater placed in the membrane was also demonstrated, enabling these devices to be used in gas sensing procedures. We present a methodology and general strategy for the fabrication and characterization of portable and reliable nanowire-based devices.

引用

页数：5

共 17 条

[1] Influence of the particle size on the surface reactivity and gas sensing properties of SnO2 nanopowders [J].