Electrodeposited Co-Pt micron-size magnets with strong perpendicular magnetic anisotropy for MEMS applications

Co80Pt20 cylindrical magnets (height, h= 2 mu m and diameter, Phi = 5 mu m and 10 mu m) have been succesfully fabricated by electroplating through resist mask onto Cu(1 1 1) seed layer, at current density of 30 mA/cm(2). Strong perpendicular magnetic anisotropy was observed owing to the large magnetocrystalline anisotropy, which yielded high perpendicular coercivity (4.7 kOe or 374 kA/m) and retentivity (6.2 kG or 0.62 T). Large energy product (6.52 MGOe or 52 kJ/ m(3)) was achieved which compares favorably with that of bulk ferrites, rendering these structures potential candidates for hard magnetic componenets in MEMS. (C) 2004 Elsevier B. V. All rights reserved.