Isolated interstitial hydrogen molecules in hydrogenated crystalline silicon

被引：122

作者：

Pritchard, RE ^{[1
]}

Ashwin, MJ ^{[1
]}

Tucker, JH ^{[1
]}

Newman, RC ^{[1
]}

机构：

[1] Univ London Imperial Coll Sci Technol & Med, Blackett Lab, Interdisciplinary Res Ctr Semicond Mat, London SW7 2BZ, England

来源：

PHYSICAL REVIEW B | 1998年 / 57卷 / 24期

关键词：

D O I：

10.1103/PhysRevB.57.R15048

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

Infrared spectra of hydrogenated lightly doped Czochralski silicon show absorption due to (a) modes of O-i-H-2 centers (binding energy 0.26 eV), and (b) a mode labeled nu(3HH) at 3618 cm(-1) due to H-2 molecules. Annealing produces reversible changes in the equilibrium concentrations of O-i-H-2 and nu(3HH) that reveal a linear anticorrelation. An analysis using a two-center statistical model indicates that the number density of available sites for nu(3HH) centers is 10(22)-10(23) cm(-3) and we propose that the nu(3HH) centers are isolated molecules occupying interstitial lattice sites. The H-2 alignment must be (111) or (110) to account for the infrared activity.

引用

页码：15048 / 15051

页数：4

共 22 条

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