Industrial applications of pulsed lasers to materials microprocessing

被引：20

作者：

Gower, MC ^{[1
]}

机构：

[1] Exitech Ltd, Oxford OX8 8LH, England

来源：

HIGH-POWER LASER ABLATION, PTS 1-2 | 1998年 / 3343卷

关键词：

materials microprocessing; pulsed lasers; laser ablation; industrial applications;

D O I：

10.1117/12.321564

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

The use of pulsed lasers for microprocessing material in several manufacturing industries is presented. Deep-uv photolithography, via hole and ink jet printer nozzle microdrilling, solar panel thin film scribing, texturing of hard disks, annealing amorphous silicon in flat panel displays, fiber Bragg grating production and micro-electro-mechanical system (MEMS) fabrication applications are discussed.

引用

页码：171 / 182

页数：12