Material development and processing for electro-optic device systems

被引：10

作者：

Jin, DL ^{[1
]}

Dinu, R ^{[1
]}

Parker, TC ^{[1
]}

Barklund, A ^{[1
]}

Bintz, L ^{[1
]}

Chen, BQ ^{[1
]}

Flaherty, C ^{[1
]}

Guan, HW ^{[1
]}

Huang, DY ^{[1
]}

Kressbach, J ^{[1
]}

Londergan, T ^{[1
]}

Mino, TD ^{[1
]}

Todorova, G ^{[1
]}

Yang, S ^{[1
]}

机构：

[1] Lumera Corp, Bothell, WA 98011 USA

来源：

ORGANIC PHOTONIC MATERIALS AND DEVICES V | 2003年 / 4991卷

关键词：

low optical loss clads; waveguide etching; hardmask;

D O I：

10.1117/12.479448

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

New crosslinked clad polymers were developed for electro-optic polymer modulators with special attention paid to properties such as refractive index tunability, optical loss, and conductivity. These cured polymers showed relatively low optical loss at 1550 nm and desirable conductivity. The clads were used to fabricate electro-optic devices having mode profiles closely matched to that of optical fibers in order to reduce insertion loss. A new hardmasking technique was developed to define Mach-Zehnder rib waveguides by photolithography and dry etching with high reliability and surface smoothness. The hardmasking technique demonstrated flexibility in defining waveguides made with electro-optic polymers having different reactivity towards etchant gasses.

引用

收藏

页码：610 / 620

页数：11

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