Synthesis of nanocrystalline multiphase titanium oxycarbide (TiCxOy) thin films by UNU/ICTP and NX2 plasma focus devices

被引：60

作者：

Hassan, M. ^{[1
]}

Rawat, R. S. ^{[2
]}

Lee, P. ^{[2
]}

Hassan, S. M. ^{[2
]}

Qayyum, A. ^{[1
]}

Ahmad, R. ^{[1
]}

Murtaza, G. ^{[4
]}

Zakaullah, M. ^{[3
]}

机构：

[1] Govt Coll Univ, Dept Phys, Lahore 54000, Pakistan

[2] Nanyang Technol Univ, Natl Inst Educ, Singapore 637616, Singapore

[3] Quaid I Azam Univ, Dept Phys, Islamabad 45320, Pakistan

[4] Govt Coll Univ, Lahore 54000, Pakistan

来源：

APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING | 2008年 / 90卷 / 04期

关键词：

D O I：

10.1007/s00339-007-4335-8

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

Nanocrystalline multiphase titanium oxycarbide (TiCxOy) thin films composed of TiC2, TiO0.325, Ti2O3 and graphitic carbon have been deposited on titanium substrates, using energetic carbon ions delivered by the UNU/ICTP and the NX2 plasma focus devices operated at different repetition rates. X-ray diffraction (XRD) patterns of the nanocomposite films reveal the relative transformation of various oxide and carbide phases accompanied by the suppression of the TiC2 phase when the energy flux of the ion beam and the repetition rate are increased. A field emission scanning electron microscope (FESEM) with an energy dispersive X-ray spectroscopy (EDS) attachment reveals a non-porous microcrack-free nanocrystalline granular surface morphology of the composite films with uniform carbon distribution. X-ray photoelectron spectroscopy (XPS) confirms the formation of oxycarbides (TiCxOy) along with significant carbon adsorbate. Raman studies of the films also verify the relative phase transformation in the TiCxOy nanocomposite by tuning the deposition parameters. The Vickers microhardness of the sample surface is improved more than 400%.

引用

页码：669 / 677

页数：9

共 40 条

[1] Study of lateral spread of ions emitted from 2.3 kJ plasma focus with hydrogen and nitrogen gases [J].