Porous broadband antireflection coating by glancing angle deposition

被引:192
作者
Kennedy, SR [1 ]
Brett, MJ [1 ]
机构
[1] Univ Alberta, Dept Elect & Comp Engn, Level Elect & Comp Engn Res Facil 2, Edmonton, AB T6G 2V4, Canada
关键词
D O I
10.1364/AO.42.004573
中图分类号
O43 [光学];
学科分类号
070207 ; 0803 ;
摘要
We deposited graded-index SiO2 films using glancing angle deposition to produce high-transmission antireflection coatings on glass. Because of the accurate control over the thin-film microstructure provided by this technique, we were able to create graded densities with a Gaussian profile resulting in transmission values greater than 99.9% for a single-layer interface with bandwidths up to 460 nm. The graded-index layer also provides low reflectance at nonnormal angles of incidence with transmission values degrading little for incidence angles up to 30degrees. (C) 2003 Optical Society of America.
引用
收藏
页码:4573 / 4579
页数:7
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