Deposition of BaTiO3 thin films by a hybrid DC-field enhanced PLD-process

被引：9

作者：

Husmann, A ^{[1
]}

Mertin, M ^{[1
]}

Klotzbucher, T ^{[1
]}

Kreutz, EW ^{[1
]}

机构：

[1] FRAUNHOFER INST LASERTECH, D-52074 AACHEN, GERMANY

来源：

APPLIED SURFACE SCIENCE | 1997年 / 109卷

关键词：

D O I：

10.1016/S0169-4332(96)00624-1

中图分类号：

O64 [物理化学（理论化学）、化学物理学];

学科分类号：

070304 ; 081704 ;

摘要：

BaTiO3 thin films are deposited onto (111)-Si/Ti/Pt using a hybrid DC-field enhanced pulsed laser deposition (PLD)-technique with excimer laser radiation. Space- and time-resolved plasma emission spectroscopy (PES) is used for determination of the mean velocity of the particle species within the plasma/vapour. The structural properties of the films are characterised by XRD-measurements and micro-Raman spectroscopy. The electrical properties are analysed by impedance measurements. The electric field influences the number of excited and ionised particles within the ambient gas and plasma, caused by a discharge in the ambient gas and interaction between ambient gas and plasma. The hybrid process allows production of crystalline films of the tetragonal phase at reduced deposition temperatures. Dielectric constants of up to epsilon(r)=320 are obtained.

引用

页码：293 / 298

页数：6

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