Design of a cylindrical ultrasonic micromotor to obtain mechanical output

被引:36
作者
Morita, T
Kurosawa, M
Higuchi, T
机构
来源
JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS BRIEF COMMUNICATIONS & REVIEW PAPERS | 1996年 / 35卷 / 5B期
关键词
microelectromechanical system; microactuator; ultrasonic motor; hydrothermal method; PZT thin film;
D O I
10.1143/JJAP.35.3251
中图分类号
O59 [应用物理学];
学科分类号
摘要
A cylindrical ultrasonic micromotor has been demonstrated and the operating principle has been confirmed. The stator transducer in this motor was 2.4 mm in diameter, 10 mm long and 0.25 mm thick. One advantage of the ultrasonic micromotor is the possibility of high torque. However, the previous motor was only used to rotate the tiny screw which was used as a rotor. We presents a method of improving the efficiency of this ultrasonic micromotor and the results obtained.
引用
收藏
页码:3251 / 3254
页数:4
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