Miniature all-silica fiber optic pressure and acoustic sensors

被引：154

作者：

Xu, JC ^{[1
]}

Wang, XW ^{[1
]}

Cooper, KL ^{[1
]}

Wang, AB ^{[1
]}

机构：

[1] Virginia Polytech Inst & State Univ, Ctr Photon Technol, Bradley Dept Elect & Comp Engn, Blacksburg, VA 24061 USA

来源：

OPTICS LETTERS | 2005年 / 30卷 / 24期

关键词：

D O I：

10.1364/OL.30.003269

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

We present a miniature diaphragm-based Fabry-Perot (F-P) interferometric fiber optic sensor fabricated by novel techniques for pressure or acoustic wave measurement that is only similar to 0.32 mm in diameter. By choosing different diaphragm thicknesses and effective diameters, we obtain a sensor measurement range from 5 to 10,000 psi (1 psi = 51.72 Torr) and a frequency response up to 2 MHz. In addition, the sensor's F-P cavity can be set from micrometers to millimeters with a precision of several nanometers. With the all-silica structure, the sensor is reliable, biocompatible, and immune to electromagnetic interference and has high-temperature sensing capability. (c) 2005 Optical Society of America

引用

页码：3269 / 3271

页数：3

共 15 条

[1] A novel MEMS pressure sensor fabricated on an optical fiber [J].

Abeysinghe, DC ;

Dasgupta, S ;

Boyd, JT ;

Jackson, HE .

IEEE PHOTONICS TECHNOLOGY LETTERS, 2001, 13 (09) :993-995

[2]

[Anonymous], 1982, FLAT CORRUGATED DIAP

[3]

CIBULA E, 2002, SENSORS 2002 P, V1, P711

[4] Embedded micromachined fiber-optic Fabry-Perot pressure sensors in aerodynamics applications [J].

Gander, MJ ;

MacPherson, WN ;

Barton, JS ;

Reuben, RL ;

Jones, JDC ;

Stevens, R ;

Chana, KS ;

Anderson, SJ ;

Jones, TV .

IEEE SENSORS JOURNAL, 2003, 3 (01) :102-107

[5] Novel data processing techniques for dispersive white light interferometer [J].

Qi, B ;

Pickrell, GR ;

Xu, JC ;

Zhang, P ;

Duan, YH ;

Peng, W ;

Huang, ZY ;

Huo, W ;

Xiao, H ;

May, RG ;

Wang, A .

OPTICAL ENGINEERING, 2003, 42 (11) :3165-3171

[6] UV-induced intrinsic Fabry-Perot interferometric fiber sensors [J].

Shen, F ;

Peng, W ;

Cooper, K ;

Pickrell, G ;

Wang, AB .

SENSORS FOR HARSH ENVIRONMENTS, 2004, 5590 :47-56

[7]

TOTSU K, 2003, TRANSDUCERS SOLID ST, V1, P931

[8] Self-calibrated interferometric-intensity-based optical fiber sensors [J].

Wang, A ;

Xiao, H ;

Wang, J ;

Wang, ZY ;

Zhao, W ;

May, RG .

JOURNAL OF LIGHTWAVE TECHNOLOGY, 2001, 19 (10) :1495-1501

[9]

WANG X, IN PRESS OPT LETT

[10]

XU J, 2005, C LAS EL OPT CLEO 05

← 1 2 →