Field emitter arrays based on natural self-organized porous anodic alumina

被引:6
作者
Govyadinov, AN [1 ]
Zakhvitcevich, SA [1 ]
机构
[1] Byelarussian Acad Sci, Inst Elect, Vacuum Microelect Lab, Minsk 220841, BELARUS
来源
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B | 1998年 / 16卷 / 03期
关键词
D O I
10.1116/1.589988
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
The field emitter array (FEA) conception with tip's density up to 10(10) cm(-2) based on natural porous anodic alumina is proposed and its realizability is demonstrated. The basic technological steps of FEA based on the anodic alumina and emission characteristic are shown. (C) 1998 American Vacuum Society.
引用
收藏
页码:1222 / 1225
页数:4
相关论文
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