Micro-machined electron transparent alumina vacuum windows

被引：16

作者：

Doll, T ^{[1
]}

Hochberg, M ^{[1
]}

Barsic, D ^{[1
]}

Scherer, A ^{[1
]}

机构：

[1] CALTECH, Pasadena, CA 91125 USA

来源：

SENSORS AND ACTUATORS A-PHYSICAL | 2000年 / 87卷 / 1-2期

关键词：

electron transmission; porous alumina; membranes; atmospheric EDX; vacuum window;

D O I：

10.1016/S0924-4247(00)00461-1

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

We report the use of porous alumina membranes as stable electron transparent windows for atmospheric electron spectroscopy applications. This material is very brittle and under compressive stress, and therefore of limited use. We developed a method of forming these membranes being tensile, within a monolithic, stable aluminum frame, enabling handling and making it possible to mount these elements in MEMS systems. Ten micron thick membranes showed a high electron transmissivity for electron energies down to 5 kV, and their mechanical properties are close to state of the art for MEMS vacuum windows. Self-collimated channeling of electrons along the pores is proposed as an explanation for the unexpected electron transparency of these membranes. (C) 2000 Elsevier Science B.V. All rights reserved.

引用

页码：52 / 59

页数：8

共 28 条

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