A surface view of etching

被引：28

作者：

Boland, JJ ^{[1
]}

Weaver, JH

机构：

[1] Univ N Carolina, Dept Chem, Chapel Hill, NC 27515 USA

[2] Univ Minnesota, Dept Chem Engn & Mat Sci, Minneapolis, MN 55455 USA

来源：

PHYSICS TODAY | 1998年 / 51卷 / 08期

关键词：

D O I：

10.1063/1.882369

中图分类号：

O4 [物理学];

学科分类号：

0702 ;

摘要：

Experiments conducted with scanning tunneling microscopes in ultrahigh vacuum reveal a fascinating, step-by-step picture of the etching process.

引用

页码：34 / 40

页数：7

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