A novel integrated micromachined tunable laser using polysilicon 3-D mirror

被引：39

作者：

Liu, AQ ^{[1
]}

Zhang, XM

Murukeshan, VM

Lam, YL

机构：

[1] Nanyang Technol Univ, Sch Elect & Elect, Singapore 639798, Singapore

[2] Nanyang Technol Univ, Sch Mech & Prod Engn, Singapore 639798, Singapore

来源：

IEEE PHOTONICS TECHNOLOGY LETTERS | 2001年 / 13卷 / 05期

关键词：

external cavity laser diode; optical MEMS; tunable laser; WDM;

D O I：

10.1109/68.920739

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 [电气工程]; 0809 [电子科学与技术];

摘要：

A prototype tunable laser of similar to2 mm x 1.5 mm size has been developed for wavelength-division-multiplexing (WDM) application, This device is an integrated micromachined polysilicon three-dimensional (3-D) mirror with a single-mode Fabry-Perot laser diode and an antireflection-coated optical fiber. The micromirror can be driven to move laterally by an electrostatic comb-drive that changes the external cavity length of laser diode enabling wavelength tuning, A wavelength-tunable range of 16 nm is obtained using a driving voltage within +/-3 V at a bias voltage of 10 V.

引用

页码：427 / 429

页数：3

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