Formation of SiC nanoparticles by laser-assisted CVD

Full Paper. Nanocrystals of cubic (SiC) are formed by laser-assisted gas-phase CVD synthesis using silane and acetylene as precursors. The nanocrystals (see Figure) are prepared by applying a mechanically chopped infrared excitation CO2 laser beam to the mixture. The formed SiC particles adopt the zinc blend crystal structure (beta-phase) with an average primary particle size of about 12 nm. Higher chopping frequencies yield smaller crystals. Particle size is further reduced by oxidation followed by HF etching of the outer shell.