Influence of modulation wavelength on the structure of TiC/W multilayers

TiC/W multilayers with modulation wavelength ranging from 9 nm to 45 nm were prepared by ion beam sputtering deposition at nearly ambient temperature. It was found that epitaxial growth can be obtained. The orientation relationship was always (100)W//(100)TiC and [011]W//[001]TiC. Modulation wavelength was found to have a determinant influence on whether epitaxial superlattices would be produced or randomly-orientated polycrystalline multilayers would be produced. With decreasing modulation wavelength, TiC/W multilayers experienced a transition from typical polycrystalline multilayers to highly-orientated epitaxial superlattices. The possible explanation is discussed.